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Variable-temperature, ultra-high-vacuum, atomic force microscope/scanning tunneling microscope:
Omicron VT-AFM XA
(M. Bode, Electronic & Magnetic Materials & Devices Group)
- Measurement modes include:
- Contact and non-contact AFM
- Magnetic force microscopy (MFM)
- Scanning tunneling spectroscopy
- Preparation tools include:
- Resistive sample heating
- Direct current heating
- E-beam heating
- Sputter ion etching
- Gas dosing
- E-beam evaporation
- An analysis chamber contains combined four-grid LEED/Auger optics
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Scanning probe/scanning electron microscopy: Omicron UHV Nanoprobe
(M. Bode, Electronic & Magnetic Materials & Devices Group)
- Local, nondestructive four-point contact measurements and function testing of nanodevices within complex structures; accurate probe positioning and safe approach of fragile probe tips having diameters in the range of a few tens of nanometers or less.
- Four independent STM probe tips with simultaneous SEM imaging enables a large field of view for coarse positioning as well as fine positioning of nanometer-sized structures with the SEM's high-resolution capabilities.
- UHV Gemini column for chemical mapping by scanning auger microscopy and magnetic imaging by SEM with polarization analysis (SEMPA). This yields complementary information on sample conductance, topography, chemistry, and magnetism.
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Scanning probe microscopy
- Veeco Multimode with NanoScope V Controller
(S. Darling, Electronic & Magnetic Materials & Devices Group)
- Ambient measurements in contact or tapping mode
- Fluid imaging
- Low-current scanning tunneling microscopy
- Magnetic force microscopy
- Scanning tunneling microscopy
- Variable temperature imaging
- PSIA XE-HDD with 6-inch wafer stage
(R. Divan, Nanofabrication Group)
- contact and non-contact modes
- scanning thermal microscopy
- magnetic force microscopy
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Near-field scanning optical microscope
(NSOM, see D. Gosztola, Nanophotonics Group)
- Apertureless and aperture
- Laser excitation from 260 nm to 2.4 microns.
- Variable illumination and detection geometries to accommodate a range of samples and near-field contrast mechanisms.
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